Cryogenic Probe Station System with temperature controlled vacuum chamber, microscope, on-site setup and and operating instructions through factory engineer.

Posted on August 22, 2010

PSESPE4BW

100mm / 4in Probe Station bare, wide platen bars, no scope manipulators tips

Rs

142549

 

or

$

2999

MINI Probe Station, bare, for use with 100 mm / 4" or smaller wafers, extra wide and longer platen bars, no microscope, illumination or micropositioners etc. Supply your own stereo zoom scope, manipulators, probe holders and tips.
This Probe Station is intended for academic research in a university lab. It will be equally well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units.
FEATURES:
Compact size, 320 wide x 320 deep x 280 to 400 mm high (12.5" x 12.5" x 11" to 16"), height depends on scope mounting pole adjustment
Low weight, 53 lbs
Affordable price
Ideal for small wafers, 4" or less
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
Wide platen bars (50 x 80 mm)
1 year manufacturer warranty

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$

2999

€

2407

£

1970

AUD

3420

Rs142549

Exchange rates for prices in Euro, GBP, AUD, Rs were valid on posting date, will be adjusted to invoice date if necessary.

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Optional: Platen bars for back and front (north/south)

SPECIFICATIONS:
4" stainless steel vacuum chuck
Chuck stage allows 3" x 3" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 3", 2" wafers, or dies
Left and right platen allow placement of up to 6 manipulators
Footprint: 320 x 320 mm (12.6" x 12.6")
Height without scope: between 280 and 400 mm or 11"to 16"
Net weight of base: 22 kg or 49 lbs
2 platen bars 50 x 80 x 180 mm long

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